Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures

<div>XRD spectra of TZO thin films deposited with H2/(Ar + H2) flow ratio of (a) 0% and (b) 10% at various substrate temperatures and with various H2/(Ar + H2) flow ratios at (c) RT and (d) 300°C.</div>

Journal of Nanomaterials

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Figure 4

Figure 4: Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures 

Figure 4 | Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures 