Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures

<div>Full-width at half-maximum (FWHM) and grain size of TZO thin films deposited (a) with H<sub>2</sub>/(Ar + H<sub>2</sub>) flow ratio of 0 and 10% at various substrate temperatures and (b) with various H<sub>2</sub>/(Ar + H<sub>2</sub>) flow ratios at RT and 300<sup>°</sup>C.</div>

Journal of Nanomaterials

fig5

Figure 5

Figure 5: Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures 

Figure 5 | Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures 