Physical Properties of ZnO Thin Films Codoped with Titanium and Hydrogen Prepared by RF Magnetron Sputtering with Different Substrate Temperatures

Figure 6

FE-SEM images of TZO thin films deposited at RT and 300^°C with = 0, 5%, and 10%.

(a) RT,

(b) 300^°C,

(c) RT,

(d) 300^°C,

(e) RT,

(f) 300^°C,