Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO₃ Multiferroics

Figure 3

XPS spectra obtained for a 500 nm BiFeO₃ film (S-60) grown by the ALD technique. One can readily recognize the spectral components for Fe2p (a), Bi4f (b), and also O1s lines (c).

(a)

(b)

(c)