Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO₃ Multiferroics

Table 2

Elastic modulus and hardness of S-0 and S-60 BFO thin films obtained from different deposition methods.

Method	(GPa)	(GPa)
Atomic layer deposition (ALD)	111.11–118.31	7.50–7.96
Radio frequency magnetron sputtering [7]	131.4–170.8	6.8–10.6
Sol-gel [8]	26–51	2.8–3.8
Pulsed laser deposition [18]	100	—
First-principles calculation [19]	G-AFM - 142.19; C-AFM - 144.87	—