Research Article
Structure-Dependent Mechanical Properties of ALD-Grown Nanocrystalline BiFeO3 Multiferroics
Table 2
Elastic modulus and hardness of S-0 and S-60 BFO thin films obtained from different deposition methods.
| Method | (GPa) | (GPa) |
| Atomic layer deposition (ALD) | 111.11–118.31 | 7.50–7.96 | Radio frequency magnetron sputtering [7] | 131.4–170.8 | 6.8–10.6 | Sol-gel [8] | 26–51 | 2.8–3.8 | Pulsed laser deposition [18] | 100 | — | First-principles calculation [19] | G-AFM - 142.19 C-AFM - 144.87 | — |
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