Research Article
Characterization of Al-Doped ZnO Transparent Conducting Thin Film Prepared by Off-Axis Magnetron Sputtering
Figure 3
Plan-view SEM images of AZO thin films prepared at various sample positions () of (a) 0.2, (b) 0.6, (c) 1.0, (d) 1.4, (e) 1.8, and (f) 2.2.
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