Characterization of Al-Doped ZnO Transparent Conducting Thin Film Prepared by Off-Axis Magnetron Sputtering

Figure 4

Cross-sectional SEM images of AZO thin films prepared at various sample positions () of (a) 0.2, (b) 0.6, (c) 1.0, (d) 1.4, (e) 1.8, and (f) 2.2.

(a)

(b)

(c)

(d)

(e)

(f)