Research Article
Mechanical and Tribological Properties of Carbon-Based Graded Coatings
Table 2
Deposition parameters of carbon graded coatings.
| Step
| Cr | C | C2H2 | Ar | N2 | Time | Thickness | [W] | [W] | [sccm] | [sccm] | [sccm] | [min] | [nm] |
| Version A | 1 | 1400 | 50 | 5 | 45 | 0 | 14 | 270 | 2 | 1230 | 410 | 4.4 | 45.6 | 0 | 14 | 3 | 1060 | 780 | 3.8 | 46.2 | 0 | 14 | 4 | 890 | 1150 | 3.1 | 45.2 | 1.7 | 14 | 530 | 5 | 720 | 1520 | 2.5 | 44.2 | 3.3 | 14 | 6 | 550 | 1890 | 1.9 | 43.1 | 5.0 | 14 | 7 | 380 | 2260 | 1.3 | 42 | 6.7 | 14 | 8 | 210 | 2630 | 0.6 | 41.1 | 8.3 | 14 | 9 | 50 | 3000 | 0 | 40 | 10.0 | 14 | 10 | 0 | 3000 | 0 | 40 | 10.0 | 30 | 200 |
| Version B | 1 | 1400 | 50 | 5 | 45 | 0 | 14 | | 2 | 1230 | 410 | 4.4 | 45.6 | 0 | 14 | | 3 | 1060 | 780 | 3.8 | 46.2 | 0 | 14 | | 4 | 890 | 1150 | 3.1 | 46.9 | 0 | 14 | 530 | 5 | 720 | 1520 | 2.5 | 47.5 | 0 | 14 | | 6 | 550 | 1890 | 1.9 | 48.1 | 0 | 14 | | 7 | 380 | 2260 | 1.3 | 45.4 | 3.3 | 14 | | 8 | 210 | 2630 | 0.6 | 42.7 | 6.7 | 14 | 270 | 9 | 50 | 3000 | 0 | 40 | 10.0 | 14 | | 10 | 0 | 3000 | 0 | 40 | 10 | 30 | 200 |
| Version C | 1 | 1400 | 50 | 20 | 30 | 0 | 14 | | 2 | 1230 | 410 | 22.5 | 27.5 | 0 | 14 | | 3 | 1060 | 780 | 25 | 25 | 0 | 14 | | 4 | 890 | 1150 | 27.5 | 22.5 | 0 | 14 | 530 | 5 | 720 | 1520 | 30 | 20 | 0 | 14 | | 6 | 550 | 1890 | 32.5 | 18.5 | 0 | 14 | | 7 | 380 | 2260 | 35 | 11.7 | 3.3 | 14 | | 8 | 210 | 2630 | 37.5 | 5.8 | 6.7 | 14 | 270 | 9 | 50 | 3000 | 40 | 0 | 10.0 | 14 | | 10 | 0 | 3000 | 0 | 40 | 10 | 30 | 200 |
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