Research Letters in Nanotechnology
Volume 2008 (2008), Article ID 492478, 4 pages
doi:10.1155/2008/492478
Research Letter

A Method for Fabricating Arrays of Nanopatterns with the Feature Size beyond Diffraction Limit

Shuhong Li, Lifang Shi, Xiaochun Dong, Chunlei Du, and Yudong Zhang

State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu 610209, China

Received 2 September 2008; Accepted 2 November 2008

Academic Editor: Federico Rosei

Copyright © 2008 Shuhong Li et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Shuhong Li, Lifang Shi, Xiaochun Dong, Chunlei Du, and Yudong Zhang, “A Method for Fabricating Arrays of Nanopatterns with the Feature Size beyond Diffraction Limit,” Research Letters in Nanotechnology, vol. 2008, Article ID 492478, 4 pages, 2008. doi:10.1155/2008/492478