Nucleation and Growth of Crystalline Grains in RF-Sputtered TiO₂ Films

Figure 3

Selected-area electron diffraction data from TiO₂ films: (a) as-deposited; (b) crystallized at 250^∘C (scale bar is 5 nm⁻¹); (c) rotationally averaged line profiles. Bars are kinematical electron-diffraction simulation of anatase powder.

(a)

(b)

(c)