103439.fig.001a
(a)
103439.fig.001b
(b)
103439.fig.001c
(c)
103439.fig.001d
(d)
Figure 1: Nonuniform residual layer thickness, (a) nonuniform residual layer thickness appears as fringes, (b) pattern was not formed after reactive ion etching, (c) cross-sectional image, residual layer thickness was 10 nm, and (d) cross-sectional image, residual layer thickness was 50 nm.