Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting

Figure 1

Nonuniform residual layer thickness, (a) nonuniform residual layer thickness appears as fringes, (b) pattern was not formed after reactive ion etching, (c) cross-sectional image, residual layer thickness was 10 nm, and (d) cross-sectional image, residual layer thickness was 50 nm.

(a)

(b)

(c)

(d)