Research Article

Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting

Figure 5

Examination of nonuniformity of the residual layer by gray-scale histogram: (a) reference gray-scale histogram, (b) with low-viscosity resin, nonuniformity of the residual layer was 71%, (c) with middle-viscosity resin, nonuniformity of the residual layer was 49%, and (d) with high-viscosity resin, nonuniformity of the residual layer was 5%.
103439.fig.005a
(a)
103439.fig.005b
(b)
103439.fig.005c
(c)
103439.fig.005d
(d)