Research Article
Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting
Table 1
Imprinting conditions for fabrication of 165 dies.
| | Spin-coated resin thickness | 200 nm | Photocurable resin viscosity (low)
Photocurable resin viscosity (high) | 1,200 mPa·s
12,000 mPa·s | | Imprinting pressure | 2 MPa | | Platen feed velocity | 1 μm/s | Total UV light exposure
1-cycle UV light exposure time | 30 mW/cm2
12 s | Total fabrication time
1-cycle fabrication time | 3.4 h
74.2 s | | Imprinting temperature | Room temperature |
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