Table 1: Imprinting conditions for fabrication of 165 dies.

Spin-coated resin thickness200 nm
Photocurable resin viscosity (low)
Photocurable resin viscosity (high)
1,200 mPa·s
12,000 mPa·s
Imprinting pressure2 MPa
Platen feed velocity1 μm/s
Total UV light exposure
1-cycle UV light exposure time
30 mW/cm2
12 s
Total fabrication time
1-cycle fabrication time
3.4 h
74.2 s
Imprinting temperatureRoom temperature