Fabrication of Axial and Radial Heterostructures for Semiconductor Nanowires by Using Selective-Area Metal-Organic Vapor-Phase Epitaxy
Figure 20
Cross-sectional structures and SEM images of nanowires. (a) Schematic of cross-sections of InP/InAs/InP core-multishell nanowire. (b) SEM image of periodically aligned InP/InAs/InP core-multishell nanowire array. Inset is top view of high-resolution SEM image of core-multishell nanowire observed after anisotropic dry etching and stain etching [31].
