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Journal of Nanotechnology
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2012
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Article
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Fig 4
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Research Article
SU-8 as Hydrophobic and Dielectric Thin Film in Electrowetting-on-Dielectric Based Microfluidics Device
Figure 4
Process flow of EWOD device.
(a)
SiO
2
(b)
Cr/Au etching
(c)
Spin-coated SU-8 as dielectric