Nano- and Macrotribological Properties of Nanoperiod Multilayer Films Deposited by Bias Sputtering
Figure 14
Three-step grooves on the nanoperiod multilayer films. (a) CN/BN 4-nm-period film; processing loads of 40, 50, 70 μN from left to right. (b) CN/BN 2-nm-period film; processing loads of 10, 15, 20 μN from left to right.
