A Combined Ion Implantation/Nanosecond Laser Irradiation Approach towards Si Nanostructures Doping

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="635705.fig.004a" src="https://static.hindawi.com/articles/jnt/volume-2012/635705/figures/635705.fig.004a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b><svg height="10.925" id="M52" style="vertical-align:-3.13504pt" version="1.1" viewbox="0 0 13.7875 10.925" width="13.7875" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,10.925)">
<g transform="translate(72,-63.26)">
<text transform="matrix(1,0,0,-1,-71.95,66.44)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝜀</tspan>
</text>
<text transform="matrix(1,0,0,-1,-65.9,63.31)">
<tspan style="font-size: 8.75px; " x="0" y="0">1</tspan>
</text>
</g>
</g>
</svg>  and <svg height="10.925" id="M53" style="vertical-align:-3.13504pt" version="1.1" viewbox="0 0 13.7875 10.925" width="13.7875" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,10.925)">
<g transform="translate(72,-63.26)">
<text transform="matrix(1,0,0,-1,-71.95,66.44)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝜀</tspan>
</text>
<text transform="matrix(1,0,0,-1,-65.9,63.31)">
<tspan style="font-size: 8.75px; " x="0" y="0">2</tspan>
</text>
</g>
</g>
</svg> for bulk Si and Si NCs embedded in SiO<sub>2</sub> after a 407 mJ/cm<sup>2</sup>  laser irradiation</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="635705.fig.004b" src="https://static.hindawi.com/articles/jnt/volume-2012/635705/figures/635705.fig.004b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b><svg height="10.925" id="M54" style="vertical-align:-3.13504pt" version="1.1" viewbox="0 0 13.7875 10.925" width="13.7875" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,10.925)">
<g transform="translate(72,-63.26)">
<text transform="matrix(1,0,0,-1,-71.95,66.44)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝜀</tspan>
</text>
<text transform="matrix(1,0,0,-1,-65.9,63.31)">
<tspan style="font-size: 8.75px; " x="0" y="0">1</tspan>
</text>
</g>
</g>
</svg> and <svg height="10.925" id="M55" style="vertical-align:-3.13504pt" version="1.1" viewbox="0 0 13.7875 10.925" width="13.7875" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,10.925)">
<g transform="translate(72,-63.26)">
<text transform="matrix(1,0,0,-1,-71.95,66.44)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝜀</tspan>
</text>
<text transform="matrix(1,0,0,-1,-65.9,63.31)">
<tspan style="font-size: 8.75px; " x="0" y="0">2</tspan>
</text>
</g>
</g>
</svg> for bulk Si and Si NCs embedded in SiO<sub>2</sub> after <svg height="14.5" id="M56" style="vertical-align:-0.3135pt" version="1.1" viewbox="0 0 52.075001 14.5" width="52.075001" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,14.5)">
<g transform="translate(72,-60.4)">
<text transform="matrix(1,0,0,-1,-71.95,60.76)">
<tspan style="font-size: 12.50px; " x="0" y="0">5</tspan>
<tspan style="font-size: 12.50px; " x="9.0271664" y="0">×</tspan>
<tspan style="font-size: 12.50px; " x="19.804752" y="0">1</tspan>
<tspan style="font-size: 12.50px; " x="26.056252" y="0">0</tspan>
</text>
<text transform="matrix(1,0,0,-1,-39.64,65.93)">
<tspan style="font-size: 8.75px; " x="0" y="0">1</tspan>
<tspan style="font-size: 8.75px; " x="4.3759999" y="0">5</tspan>
</text>
</g>
</g>
</svg> As/cm<sup>2</sup>  ion implantation followed by a 407 mJ/cm<sup>2 </sup>laser irradiation</td></tr></table></td></tr></table>

<table>Optical constants <svg height="10.925" id="M50" style="vertical-align:-3.13504pt" version="1.1" viewbox="0 0 13.7875 10.925" width="13.7875" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,10.925)">
<g transform="translate(72,-63.26)">
<text transform="matrix(1,0,0,-1,-71.95,66.44)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝜀</tspan>
</text>
<text transform="matrix(1,0,0,-1,-65.9,63.31)">
<tspan style="font-size: 8.75px; " x="0" y="0">1</tspan>
</text>
</g>
</g>
</svg> (real part of the dielectric constant, related to the reflection coefficient) and <svg height="10.925" id="M51" style="vertical-align:-3.13504pt" version="1.1" viewbox="0 0 13.7875 10.925" width="13.7875" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,10.925)">
<g transform="translate(72,-63.26)">
<text transform="matrix(1,0,0,-1,-71.95,66.44)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝜀</tspan>
</text>
<text transform="matrix(1,0,0,-1,-65.9,63.31)">
<tspan style="font-size: 8.75px; " x="0" y="0">2</tspan>
</text>
</g>
</g>
</svg> (imaginary part of the dielectric constant, related to the extinction coefficient) measured by the spectroscopic ellipsometry.</table>

Journal of Nanotechnology

fig4

Figure 4

Figure 4: A Combined Ion Implantation/Nanosecond Laser Irradiation Approach towards Si Nanostructures Doping 