Research Article

On the Tapping Mode Measurement for Young’s Modulus of Nanocrystalline Metal Coatings

Table 1

Values for , displacement ( ), Poisson’s ratio ( ), and elastic modulus .

Sample (Hz·nm−1/2) (nm) (GPa) (GPa)Cubic materials (GPa)
(111)(110)(100)

Polycarbonate pC 5.0840.373.5
Fused silica SiO2 4.17700.1772
Fused quartz SiO2 3.25700.1772
Hydroxyapatite HA 1.46860.2785
Silicon Si(100) 1.181270.27130188 169 130
Vanadium V(110) 1.631300.37125119 125147
Silicon Si(111) 2.741760.27188188169 130
Tantalum Ta(110) 1.621870.34192216 192144
Nickel Ni(111) 1.712690.31305305227 129
Fused sapphire Al2O3 0.983670.27470
Sapphire Al2O3(00.2) 0.783820.27496