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Journal of Nanotechnology
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Journal of Nanotechnology
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2014
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Article
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Fig 14
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Review Article
Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing
Figure 14
AFM profiles of evenly interspaced lines mechanochemically processed by tip sliding on silicon before and after etching with 10% KOH solution.
(a)
Line pitch 500 nm
(b)
Line pitch 400 nm
(c)
Line pitch 300 nm
(d)
Line pitch 200 nm