Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing

Figure 15

Model of a nanofabrication process using mechanochemically and naturally oxidized areas as etching masks. (a) Before processing, (b) during the first processing step at high load, and (c) during the second processing step at low load.

(a) Before processing

(b) First processing at higher load

(c) Second processing at lower load