Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="102404.fig.009a" src="https://static.hindawi.com/articles/jnt/volume-2014/102404/figures/102404.fig.009a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>Tensile stress</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="102404.fig.009b" src="https://static.hindawi.com/articles/jnt/volume-2014/102404/figures/102404.fig.009b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>Maximum shearing stress</td></tr></table></td></tr></table>

<table>Contact stress effects on protuberance heights and groove depths. (a) Tensile stress effect and (b) maximum shear stress effect.</table>

Journal of Nanotechnology

fig9

Figure 9

Figure 9: Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing 