170415.fig.006a
(a)
170415.fig.006b
(b)
Figure 6: SEM images of sections of a 100 μm diameter Fresnel zone plate made of gold and patterned by IBL. The outermost ring is approximately 100 nm wide and has a 5 : 1 aspect ratio. This plate was tested and shown to provide 100 nm imaging resolution when used with 1200 eV X-rays. Reprinted from [135].