Fabrication of Patterned Integrated Electrochemical Sensors

Figure 12

Electrochemical impedance spectroscopy results: (a) comparison of planar and patterned electrodes (10 μm, 300 nm, and 200 nm) on the same scale. Direction of arrow indicates increasing frequency. (b) Rescaled view of impedances to highlight micropatterned electrodes. (c) Rescaled view of impedances to highlight nanopatterned electrodes.

(a)

(b)

(c)