Amorphous Silicon-Germanium Films with Embedded Nanocrystals for Thermal Detectors with Very High Sensitivity

Figure 2

Surface analysis by AFM in :H films, corresponding to (a) Series #1:  500 mTorr, (b) Series #1:  1000 mTorr, (c) Series #1:  1200 mTorr. (d) Series #2:  500 mTorr, (e) Series #2:  1000 mTorr, and (f) Series #2:  1200 mTorr.

(a)

(b)

(c)

(d)

(e)

(f)