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Journal of Nanotechnology
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2016
/
Article
/
Fig 5
/
Research Article
Amorphous Silicon-Germanium Films with Embedded Nanocrystals for Thermal Detectors with Very High Sensitivity
Figure 5
Deposition rate (
) in two series of deposited films. Series #1: SiH
4
/GeH
4
= 1 and Series #2: SiH
4
/GeH
4
= 9.