Reliability and Fatigue Analysis in Cantilever-Based MEMS Devices Operating in Harsh Environments

Table 3

Electrical failures.

Electric short and open circuit
Failure	Dielectric material degradation	ESD, high electric field	Electromigration	Oxidation
Causes	Capacitive discharges	excessive load	Mismatch load	Environmental
Contamination
Failure	Intrinsic (crystal growth)	Manufacturing-induced	Usage environment
Causes	Environmental	Rough handling in industry	Low, high temperature and humidity