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Journal of Sensors
/
2008
/
Article
/
Tab 1
/
Research Article
Titanium Dioxide-Based
YX
Surface Acoustic Wave Hydrogen Gas Sensors
Table 1
Values of thickness, refractive index, and porosity of Ti
and Ti
-Au films measured by ellipsometry.
Samples
Film thickness
Refractive index
Porosity
(nm)
at 589 nm
(%)
Ti
at 300
°
C
48
2.09
37
Ti
-Au at 300
°
C
48
2.14
33