160698.fig.002a
160698.fig.002b
Figure 2: Schematics of sensor fabrication process. (a) Synthesis of anodic aluminum oxide (AAO) on p-type Si substrate, (b) synthesis of CNTs by thermal CVD, (c) removal of the top carbon layer by oxygen plasma, (d) Ag electrode deposition and (e) switching of the sensor measured at different NH3 concentrations. Reprinted with permission [29].