Carbon Nanotubes as Active Components for Gas Sensors
Figure 2
Schematics of sensor fabrication process. (a) Synthesis of anodic aluminum oxide (AAO) on p-type Si substrate, (b) synthesis of CNTs by thermal CVD, (c) removal of the top carbon layer by oxygen plasma, (d) Ag electrode deposition and (e) switching of the sensor measured at different NH3 concentrations. Reprinted with permission [29].
