Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing

<table>SEM view of slotted MMI device. (a) Top view: 750<svg height="8.5" id="M52" style="vertical-align:-0.0pt" version="1.1" viewbox="0 0 10.1 8.5" width="10.1" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,8.438)"><path d="M528 54l-36 -38l-198 201l-198 -201l-36 38l197 200l-197 201l36 38l198 -202l198 202l36 -38l-197 -201z" id="xD7"></path></g>
</svg>, (b) cross-section 6500<svg height="8.5" id="M53" style="vertical-align:-0.0pt" version="1.1" viewbox="0 0 10.1 8.5" width="10.1" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,8.438)"><path d="M528 54l-36 -38l-198 201l-198 -201l-36 38l197 200l-197 201l36 38l198 -202l198 202l36 -38l-197 -201z" id="xD7"></path></g>
</svg>.</table>

Journal of Sensors

fig11

Figure 11

Figure 11: Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing 