Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing

<table>Schematic representation of a MMI with six-slots of equal widths <svg height="16.4125" id="M25" style="vertical-align:-3.39069pt" version="1.1" viewbox="0 0 46.674999 16.4125" width="46.674999" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,12.138)"><path d="M300 -147l-18 -23q-106 71 -159 185.5t-53 254.5v1q0 139 53 252.5t159 186.5l18 -24q-74 -62 -115.5 -173.5t-41.5 -242.5q0 -130 41.5 -242.5t115.5 -174.5z" id="x28"></path></g><g transform="matrix(.017,-0,0,-.017,5.944,12.138)"><path d="M1004 650l-6 -29q-54 -6 -71 -19.5t-51 -74.5l-271 -539h-33l-98 506h-3l-258 -506h-30l-78 532q-10 67 -21.5 80t-66.5 21l6 29h241l-8 -29l-26 -5q-34 -6 -41 -16t-3 -47l59 -425h4l251 510h31l102 -510h2q150 299 198 423q14 40 8.5 48.5t-47.5 16.5l-28 5l7 29h231z
" id="x1D44A"></path></g>
<g transform="matrix(.012,-0,0,-.012,23.212,16.212)"><path d="M319 325l-25 -7q-33 99 -103 99q-29 0 -47 -19.5t-18 -49.5t22 -49.5t62 -36.5q63 -26 95 -57t32 -79q0 -64 -50 -101t-115 -37q-35 0 -67.5 10.5t-46.5 23.5q-5 11 -11 51t-6 67l27 5q14 -53 46.5 -88.5t75.5 -35.5q29 0 50 19.5t21 50.5t-19.5 51.5t-59.5 39.5
q-28 12 -46 22.5t-38.5 27t-30.5 38.5t-10 49q0 54 42.5 92t109.5 38q48 0 88 -18q6 -15 13 -50.5t9 -55.5z" id="x73"></path></g><g transform="matrix(.012,-0,0,-.012,27.544,16.212)"><path d="M238 0h-223v26q48 5 60 17t12 61v473q0 50 -10.5 60.5t-58.5 15.5v24q73 8 148 35v-608q0 -49 11.5 -61t60.5 -17v-26z" id="x6C"></path></g><g transform="matrix(.012,-0,0,-.012,30.554,16.212)"><path d="M257 449q92 0 154 -65t62 -158q0 -112 -67 -175t-150 -63q-98 0 -158.5 66.5t-60.5 154.5q0 59 21 106.5t54.5 75.5t71 43t73.5 15zM244 416q-48 0 -81 -47t-33 -128q0 -96 38 -158t99 -62q51 0 82 43.5t31 139.5q0 91 -36 151.5t-100 60.5z" id="x6F"></path></g><g transform="matrix(.012,-0,0,-.012,36.492,16.212)"><path d="M298 36l-68 -35q-25 -13 -42 -13q-98 0 -98 119v290h-69l-4 11l28 29h45v72l65 67l14 -2v-137h113q8 -8 6 -21t-12 -19h-107v-256q0 -96 59 -96q29 0 61 17z" id="x74"></path></g>
<g transform="matrix(.017,-0,0,-.017,40.738,12.138)"><path d="M275 270q0 -296 -211 -440l-19 23q75 62 116.5 174t41.5 243t-42 243t-116 173l19 24q211 -144 211 -440z" id="x29"></path></g>
</svg> which are separated by equal distances.</table>

Journal of Sensors

fig3

Figure 3

Figure 3: Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing 