Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr class="thead"><td align="left">Mode</td><td align="center">1st flexure</td><td align="center">2nd flexure</td><td align="center">1st torsion</td><td align="center">2nd torsion</td></tr><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr><td align="left">Resonant frequency (kHz)</td><td align="center">52.3</td><td align="center">328</td><td align="center">293</td><td align="center">924</td></tr><tr><td align="left">Generalized mass (kg)</td><td align="center">5.24e-11</td><td align="center">5.23e-11</td><td align="center">3.09e-11</td><td align="center">2.58e-11</td></tr><tr><td align="left">Damping coefficient <svg height="15.65" id="M24" style="vertical-align:-3.39069pt" version="1.1" viewbox="0 0 18.3375 15.65" width="18.3375" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg>N/<svg height="12.175" id="M26" style="vertical-align:-3.56265pt" version="1.1" viewbox="0 0 9.5625 12.175" width="9.5625" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg>m/s)</td><td align="center">2.39e-8</td><td align="center">2.37e-8</td><td align="center">2.04e-8</td><td align="center">1.80e-8</td></tr><tr><td align="left">Damping ratio <svg height="16.924999" id="M27" style="vertical-align:-3.3907pt" version="1.1" viewbox="0 0 91.637497 16.924999" width="91.637497" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg></td><td align="center">6.94e-4</td><td align="center">1.09e-4</td><td align="center">1.80e-4</td><td align="center">6.01e-5</td></tr><tr><td align="left">Quality factor <svg height="15.9125" id="M28" style="vertical-align:-2.57985pt" version="1.1" viewbox="0 0 63.537498 15.9125" width="63.537498" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg></td><td align="center">720</td><td align="center">3587</td><td align="center">2778</td><td align="center">8319</td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Simulated results for a rectangular cantilevers resonating in different modes.

Journal of Sensors

tab1

Table 1

Table 1: Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection 