Conductometric Gas Nanosensors

Table 5

The different nanomaterial fabrication processes used for gas nanosensor sensitive layer fabrication.

Sensitive layer processing technique	CNT	Nanosilicon	Nano-MOX	Nanometal	References
Commercial material	x		x		[33, 34, 38–40, 44–47, 121, 123, 127, 128, 131]
Electrochemical		x	x		[51, 54, 56–58, 60, 61, 63–67, 70–87, 89, 96, 133]
Chemical			x		[91, 97, 99–101, 110, 111, 126, 134]
Electro/dielectro-phoresis				x	[115–120]
MBE			x		[109, 135]
Thermal evaporation			x		[94, 95, 98, 104, 107, 122, 130]
Pyrolysis	x				[41, 43]
Microwave			x		[42, 68]
CVD-VLS	x				[35, 88, 102, 124, 129, 132]
HiPco	x				[32]
Laser ablation	x		x		[30, 31, 114]