Gas nanosensor technological process References (
) Deposition of the nanomaterial in the form of a dispersion on a prepatterned substrate. [32 , 38 –42 , 45 , 68 , 82 , 94 , 95 , 97 , 100 , 104 , 107 , 111 , 118 , 121 –123 , 127 –132 , 134 ] (
) Nanomaterial, in the form of a dispersion, is deposited on the substrate and contacting electrodes are realized onto the nanomaterial. [54 , 61 , 63 , 75 , 76 , 78 , 80 , 81 , 84 , 85 , 88 , 91 , 96 , 98 , 99 , 102 , 106 , 109 , 114 , 126 ] (
) “Growth in place”: the fabrication of the nanomaterial is performed exactly where the nanodevice architecture requires it, exploiting existing electrodes. [35 , 46 , 110 , 119 , 120 , 124 , 133 ] Others (mainly optical) [51 , 56 –58 , 60 , 65 –67 , 70 –74 , 79 , 87 , 89 ]
