Highly Sensitive InO<sub>x</sub> Ozone Sensing Films on Flexible Substrates

<table>(a) Transparent <svg height="15.5125" id="M15" style="vertical-align:-3.27605pt" version="1.1" viewbox="0 0 33.887501 15.5125" width="33.887501" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.363)"><path d="M303 0h-265v28q62 5 76 19.5t14 77.5v400q0 63 -14 77.5t-76 19.5v28h265v-28q-62 -5 -76 -19.5t-14 -77.5v-400q0 -64 14 -78t76 -19v-28z" id="x49"></path></g><g transform="matrix(.017,-0,0,-.017,5.587,11.363)"><path d="M524 0h-209v26q44 5 55 18t11 65v167q0 114 -91 114q-50 0 -109 -51v-235q0 -50 10 -61.5t55 -16.5v-26h-217v26q51 5 62 17t11 61v206q0 47 -9.5 58.5t-50.5 19.5v23q82 15 139 40v-79l67 47q47 30 83 30q60 0 94.5 -40t34.5 -112v-193q0 -50 10 -61.5t54 -16.5v-26z
" id="x6E"></path></g><g transform="matrix(.017,-0,0,-.017,14.885,11.363)"><path d="M381 665q131 0 226.5 -93t95.5 -239q0 -158 -96 -253t-238 -95q-137 0 -231 95t-94 238q0 142 92.5 244.5t244.5 102.5zM359 629q-89 0 -151 -74.5t-62 -208.5q0 -141 69 -233t175 -92q90 0 150.5 74t60.5 211q0 152 -69 237.5t-173 85.5z" id="x4F"></path></g>
<g transform="matrix(.012,-0,0,-.012,27.588,15.45)"><path d="M474 0h-214v26q32 4 39 12t-5 28l-74 117q-39 -58 -64 -106q-16 -25 -10 -35t44 -16v-26h-186v26q46 6 64 17t48 49t85 120l-87 136q-23 36 -40 47t-58 16v26h199v-26q-31 -4 -36.5 -12.5t9.5 -29.5l59 -93q37 56 58 94q13 23 7 30t-40 11v26h183v-26q-47 -5 -65 -13.5
t-45 -39.5q-24 -29 -78 -110l97 -148q28 -43 46.5 -55.5t63.5 -18.5v-26z" id="x78"></path></g>
</svg> films on glass (left) and PET (right) substrate. (b) Flexibility of the film on PET.</table>

Journal of Sensors

fig1

Figure 1

Figure 1: Highly Sensitive InO<sub>x</sub> Ozone Sensing Films on Flexible Substrates 

Journal of Sensors

Highly Sensitive InOx Ozone Sensing Films on Flexible Substrates

Figure 1

Highly Sensitive InO_x Ozone Sensing Films on Flexible Substrates