On Mass Loading and Dissipation Measured with Acoustic Wave Sensors: A Review

<table>Sketch of the TFBAR structure in contact with liquid: 1-Si wafers, 2-AIN piezoelectric layer (aluminium nitride) piezoelectric layer, 3-Al electrodes, 4-analyzer, 5-liquid in a microfluidic system in contact with the resonator (for review, see [<a href="/journals/js/2009/943125/#B68">68</a>]).</table>

Journal of Sensors

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Figure 5

Figure 5: On Mass Loading and Dissipation Measured with Acoustic Wave Sensors: A Review 