Model Design of Piezoelectric Micromachined Modal Gyroscope

Table 1

Particular mode shapes meeting our needs.

Size* (mm)	Mode shape (x-y plate)	Size* (mm)	Mode shape (x-y plate)	Size* (mm)	Mode shape (x-y plate)
3×4×3		3×4×4		3×5×3
3×5×4		3×5×5		3×6×3
3×6×4		3×6×5		3×6×6

(*The first number of the size refers to the size in the polarization direction).