Research Article

Model Design of Piezoelectric Micromachined Modal Gyroscope

Table 2

Calculating results of quantitative indicators.

Size*F(Hz)

388045 0.19400.3021
357044 1.83461.8814
348154 0.15460.2527
326550 1.14411.1167
372396 0.08840.1326
428269 0.30430.6798
370765 0.89830.7870
427822 0.71851.9623
389186 0.60451.0323

(*The first number of the size refers to the size in the polarization direction).