Research Article
Model Design of Piezoelectric Micromachined Modal Gyroscope
Table 3
Relation between the quantitative indicators and the optimizing variables.
| Variable | Value (mm) | | | | | |
| ( mm, mm) | 0.5 | | | | 0.5602 | 0.2789 | 1 | | | | 0.6017 | 0.3016 | 1.5 | | | | 0.6815 | 0.3341 |
| ( mm, mm) | 0.45 | | | | 0.6125 | 0.2966 | 0.75 | | | | 0.5602 | 0.2789 | 1.05 | | | | 0.6030 | 0.3027 | 1.35 | | | | 0.6837 | 0.3384 |
| ( mm, mm) | 0.5 | | | | 0.5804 | 0.2861 | 1 | | | | 0.5602 | 0.2789 | 1.5 | | | | 0.5800 | 0.2890 | 2 | | | | 0.6334 | 0.3129 |
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