Model Design of Piezoelectric Micromachined Modal Gyroscope

Table 4

Relation between the quantitative indicators and the optimizing variables.

Variable	Value	𝐴𝑥	𝐴𝑦	𝐴𝑍	𝐴(𝐸𝑌/𝐸𝑋)	𝐵(𝐸𝑌/𝐸𝑍)
L (mm) (𝑑=0.5 mm, 𝑉=1V)	0.5	5.3504𝑒−015	3.8128𝑒−015	1.1329𝑒−014	0.7126	0.3366
	1	4.6164𝐸−15	3.3119𝐸−15	1.0090𝐸−14	0.7174	0.3282
	1.5	3.5850𝐸−15	2.5867𝐸−15	8.1780𝐸−15	0.7215	0.3163
	2	2.5532𝐸−15	1.8392𝐸−15	6.0732𝐸−15	0.7204	0.3028
d (mm) (𝐿=2 mm, 𝑉=1V)	0.4	4.09𝐸−15	2.94𝐸−15	8.9969𝐸−15	0.7205	0.3272
	1	3.87𝐸−15	2.79𝐸−15	8.6332𝐸−15	0.7218	0.3232
	1.6	3.5850𝐸−15	2.5867𝐸−15	8.1780𝐸−15	0.7215	0.3163
	2	3.47𝐸−15	2.50𝐸−15	7.9879𝐸−15	0.7212	0.3130
V (V) (𝐿=2 mm, 𝐷=0.5 mm)	0.5	3.4851𝐸−15	2.5637𝐸−15	4.0983𝐸−15	0.7356	0.6255
	1	2.5532𝐸−15	1.8392𝐸−15	6.0732𝐸−15	0.7204	0.3028
	1.5	3.7613𝐸−15	2.6388𝐸−15	8.4448𝐸−15	0.7016	0.3125
	2	2.4370𝐸−14	8.5989𝐸−15	4.3082𝐸−14	0.3528	0.1996