Square Diaphragm CMUT Capacitance Calculation Using a New Deflection Shape Function
Figure 19
Comparison of capacitance values calculated using the developed model with the experimental results of a MEMS capacitive microphone, measured at different bias voltages, presented in [18]. The capacitance values are calculated for the three deflection shape functions following [10, 12] and this model (11). The microphone consists of a 3-μm thick Al diaphragm, size , with acoustic holes separated from the rigid backplate with an airgap of about 1 μm.
