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Journal of Sensors
/
2011
/
Article
/
Tab 1
/
Research Article
Square Diaphragm CMUT Capacitance Calculation Using a New Deflection Shape Function
Table 1
D
evice
S
pecifications.
Parameter
Value
Unit
Diaphragm sidelength
200
μ
m
Young’s modulus
169
GPa
Residual stress
100
MPa
Poisson ratio
0.3
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