Square Diaphragm CMUT Capacitance Calculation Using a New Deflection Shape Function

Table 3

Comparison of new model-calculated capacitance values using deflection shape functions following [10, 12] and (11) with the FEA results for large diaphragm deflection. Other parameters same as in Table 2.

𝑎	ℎ	𝜎0	𝑃M	𝑤0	𝐶	𝐶 analytical (fF)			%Δ𝐶 (FEA-analytical)
						[10]	[12]	New model	[10]	[12]	New model
(μm)	(μm)	MPa	(kPa)	FEA	FEA (fF)			𝑁=2			𝑁=2
				(μm)
100	1	100	60	1.16	149.8	141.26	158.36	152.07	5.70	−5.72	−1.51
100	2	100	480	2.50	217.08	181.4	256.45	218.36	16.43	−18.14	−0.59
100	3	100	1000	2.49	209.2	178.77	249.12	208.18	14.55	−19.08	0.49
100	1	250	120	1.12	150.24	140.88	157.55	151.41	6.23	−4.86	−0.78
100	2	250	320	1.20	149.64	142.25	160.50	151.03	4.93	−7.35	−0.93
100	3	250	1000	1.85	169.6	156.72	193.08	171.89	7.59	−13.84	−1.35