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Journal of Sensors
/
2011
/
Article
/
Tab 1
/
Research Article
Electron Spin Resonance Measurement with Microinductor on Chip
Table 1
Specification of microinductor.
Shape
Inner diameter [
μ
m]
Number of turns
Line width [
μ
m]
Line spacing [
μ
m]
Rectangular spiral
240
6
10
1