Research Article
Measurement of Hepatitis B Surface Antigen Concentrations Using a Piezoelectric Microcantilever as a Mass Sensor
Table 1
Material properties and parameters used in mechanical lumped parameter model of piezoelectric microcantilever sensor (PEMS) [
12].
| Quantity | Unit | Value | Expression | Remark |
| Silicon | | | | | โE | GPa | 170 | Youngโs modulus | | โ | kg/m3 | 2329 | Density | | โ | | 0.28 | Poissonโs ratio | | Piezoelectric layer | | | | | โE | GPa | Anisotropic | | PZT5H | โ | kg/m3 | 7500 | | | Resonance frequency () | MHz | 1.345479 | In fundamental mode | Theoretical data | Effective stiffness () | N/m | 234 | , where is strain energy and is the maximum displacement of the free end of the PEMS in fundamental mode | Theoretical data | Effective mass () | ng | 3.272 | | Theoretical data |
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