An Astigmatic Detection System for Polymeric Cantilever-Based Sensors

Table 1

Mechanical properties and dimensions of an SU-8 microcantilever.

𝐸	Young’s modulus	4.2 ± 0.5 G N/m^2
𝜌	Density	1200 kg/m^3
𝐿	Length	495 μm
𝑊	Width	100 μm
𝑇	Thickness	5.3 ± 0.1 μm