Table 1: Impedance change of the plate.

FrequencyLift-off (0.5 mm) Δ 𝑍 ( Ω ) Δ 𝑅 ( Ω ) Δ 𝑋 ( Ω )

150 kHzExperiment1.27−0.990.79
Simulate1.33−1.050.82
300 kHzExperiment3.49−2.222.7
Simulate3.33−2.362.23