Table 1:
Impedance change of the plate.
Frequency
Lift-off (0.5 mm)
Δ
𝑍
(
Ω
)
Δ
𝑅
(
Ω
)
Δ
𝑋
(
Ω
)
150 kHz
Experiment
1.27
−0.99
0.79
Simulate
1.33
−1.05
0.82
300 kHz
Experiment
3.49
−2.22
2.7
Simulate
3.33
−2.36
2.23