Table 6: Successful trials in detecting trenches. In the detection of the trench width, detected data are averaged with 100 trials.

Real trench dimensionSuccessful detection rateMean value (cm)Max. value (cm)Min. value (cm)Variance (cm)

1.30 (cm) 1.30 (cm)55/100 0.0098
2.00 (cm) 2.00 (cm)90/100 0.0310