Research Article
Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor
Table 1
Positioning errors analysis of
-axis (unit in nm).
| Travel | 1st | 2nd | 3rd | 4th | 5th | Mean | |
| 3 mm | −14 | 23 | 6 | 3 | 6 | 5 | 13 | 6 mm | 48 | −36 | 5 | 12 | −2 | 5 | 30 | 9 mm | 53 | 23 | −20 | 2 | −10 | 10 | 29 | 12 mm | 32 | −24 | −42 | 52 | −22 | −1 | 40 | 15 mm | 8 | −23 | −14 | −7 | 50 | 3 | 29 |
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