Research Article
Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor
Table 2
Positioning errors analysis of
-axis (unit in nm).
| Travel | 1st | 2nd | 3rd | 4th | 5th | Mean | |
| 3 mm | 3 | −26 | 5 | 6 | 15 | 1 | 16 | 6 mm | 1 | 5 | −18 | −33 | 0 | −9 | 16 | 9 mm | −23 | 11 | 30 | −27 | 15 | 1 | 25 | 12 mm | 38 | −26 | 9 | −16 | −30 | −5 | 28 | 15 mm | 10 | 12 | −36 | −30 | −29 | −15 | 24 |
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